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Ion-Beam-Based Nanofabrication

Volume 1020

£30.99

Part of MRS Proceedings

Editors:
Daryush Ila, University of Alabama, Huntsville
John Baglin, IBM Almaden Research Center, California
Naoki Kishimoto, National Institute for Materials Science, Japan
Paul K. Chu, City University of Hong Kong

Isao Yamada, Noriaki Toyoda, Debbie J. Stokes, Laurent Roussel, Olivier Wilhelmi, Lucille A. Giannuzzi, Dominique H. W. Hubert, R. Barabash, G. Ice, R. Kroger, H. Lohmeyer, K. Sebald, J. Gutowski, T. Bottcher, D. Hommel, W. Liu, J.-S. Chung, David P. Hoogerheide, Jene A. Golovchenko, John Baglin, Andrew J. Kellock, Jane E. Frommer, Vladimir Matias, Chris Sheehan, Alp T. Findikoglu, Jens Jensen, Ruy Sanz, Marek Skupinski, Manuel Hernandez-Vélez, Göran Possnert, Klas Hjort, Yoshinori Matsui, Nozomi Miyoshi, Akihiro Oshima, Shue Seki, Masakazu Washio, Seiichi Tagawa, Sergey Gorelick, Timo Sajavaara, Mikko Laitinen, Nitipon Puttaraska, Harry J. Whitlow, Robert Lee Zimmerman, Ismet Gurhan, Daryush ILA, Xuanyong Liu, Paul K. Chu, Ahmet Oztarhan, Emel Sokullu Urkac, Nusret Kaya, Mesut Yenigul, Funda Tihminlioglu, Ayhan Ezdesir, Satilmis Budak, Claudiu Muntele, Bopha Chhay, Efim Oks, Alexey Nikolaev, Zekai Tek, Rengin Eltem, Harry Bernas, Roch Espiau de Lamaëstre, Amit Kumar, L. D. Filip, J. D. Carey, J. C. Pivin, A. Tripathi, Devesh K. Avasthi, Giovanni Mattei, Valentina Bello, Paola Mazzoldi, Giovanni Pellegrini, Chiara Maurizio, Giancarlo Battaglin, Anatoly Dvurechenskii, Nataly Stepina, Pavel Norikov, Vladislav Armrister, Valery Kesler, Anton Gutakovskii, Victor Kirienko, Zhanna Smagina, Reiner Groetzschel, Dipak Paramanik, Subrata Majumdar, Smruti Ranjan Sahoo, Shikha Varma, Bangke Zheng, Gikan Takaoka, Masakazu Kawashita, Takeshi Okada, F. Calzzani, S. Guner, C. C. Smith, Rei Araki, Volha Abidzina, I. Tereshko, I. Elkin, V. Red'ko, D. Walker, R. A. Minamisawa, Cong Qian, Zheng-xuan Zhang, Feng Zhang, Cheng-lu Lin, S. Dhamodaran, N. Sathish, Anand P. Pathak, Andrzej Turos, Brij M. Arora, Lee Chow, Guangyu Chai, Renato Amarel

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Date Published: September 2007
availability: Available
format: Hardback
isbn: 9781558999800

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It is increasingly apparent that ion-beam-based processing offers unique capabilities for fabrication and complex patterning of 3D, 2D or 1D structures at the few-nanometer scale (e.g., nanowires and quantum dots), and for custom tailoring of nanocomposites, nanoporous materials, catalyst surfaces, optical materials and nanoparticle assemblies. This book addresses achievements, applications and insights into such areas. It also seeks to identify potential dimensional limitations to the future practical implementation of this approach. Topics include: ion-beam nanofab - tools, techniques and applications; patterning, quantum dot synthesis and self assembly; and examples - applications and devices.

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Product details
- Date Published: September 2007
- format: Hardback
- isbn: 9781558999800
- length: 256 pages
- dimensions: 237 x 160 x 18 mm
- weight: 0.57kg
- availability: Available
Table of Contents
Preface
Part I. Ion Beam Nanofab: Tools, Techniques, and Applications:
1. Cluster ion beam process for nanofabrication
2. Recent advances in FIB technology for nano-prototyping and nano-characterization
3. Spatially resolved characterization of plastic deformation induced by focused-ion beam processing in structured InGaN/GaN layers
4. Dynamics of ion beam stimulated surface mass transport to nanopores
5. Ion beam lithography for nano-scale pattern features
6. Ion-beam assist nano-texturing of films
7. Swift heavy ion beam-based nanopatterning using self-assembled masks
8. High-aspect-ratio micromachining of fluoropolymers using focused ion beam
9. Resolution performance of programmable proximity aperture MeV ion beam lithography system
Part II. Patterning, Quantum Dot Synthesis, and Self Assembly:
10. Patterned adhesion of cells
11. Nano-film and coating54l for biomedical application prepared by plasma-based technologies
12. Modification of surface morphology of UHMWPE for biomedical implants
13. Ion beam-induced quantum dot synthesis in glass
14. Controlled growth of conducting carbon nanowires by ion irradiation: electrical and field emission properties
15. Core-satellite metallic nanoclusters in silica obtained by multiple ion beam processing
16. Pulsed low-energy ion-beam induced nucleation and growth of GE nanocrystals on SiO2
17. Time evolution of nano dots created on InP(111) surfaces by keV irradiation
Part III. Examples: Applications and Devices:
18. Ion bombardment improvement on thermoelectric properties of multilayered Bi2Te3/Sb2Te3 deposited by magnetron sputtering
19. Nanoscale surface modification of ultrahigh molecular weight polyethylene (UHMWPE) samples with the w + c ion implantation
20. Irradiation effects of methanol cluster ion beams on solid surfaces
21. Nano- and micro-structural evolution of UHMWPE by ion beam
22. MeV ion-beam bombardment effects on the thermoelectric figures of merit of Zn4Sb3 and ZrNiSn-based half-Heusler compounds
23. In vitro apatite formation on polymer substrates irradiated by the simultaneous use of oxygen cluster and monomer ion beams
24. Fabrication of nanoscale gold clusters by low energy ion irradiation
25. Fluence dependence of thermoelectric properties induced y ion bombardment of Zn4Sb3 and CeFe2Co2Sb12 thin films
26. Effect of implantation dose and annealing time on the formation of Si nanocrystals embedded in thermal oxide
27. Properties of nono-layers of nanoclusters of Ag in SiO2 host produced by MeV Si ion bombardment
28. Effects of MeV Si ion bombardments on the properties of nano-layers of SiO2/SiO2+Zn4Sb3
29. High resolution XRD studies of ion beam irradiated InGaAs/InP multi quantum wells
30. Focused ion beam fabrication of individual carbon nanotube devices
31. MeV ion beam fabrication of nanopores
Author index
Subject index.
Look Inside
Editors
Daryush Ila, University of Alabama, Huntsville
John Baglin, IBM Almaden Research Center, California
Naoki Kishimoto, National Institute for Materials Science, Japan
Paul K. Chu, City University of Hong Kong
Contributors
Isao Yamada, Noriaki Toyoda, Debbie J. Stokes, Laurent Roussel, Olivier Wilhelmi, Lucille A. Giannuzzi, Dominique H. W. Hubert, R. Barabash, G. Ice, R. Kroger, H. Lohmeyer, K. Sebald, J. Gutowski, T. Bottcher, D. Hommel, W. Liu, J.-S. Chung, David P. Hoogerheide, Jene A. Golovchenko, John Baglin, Andrew J. Kellock, Jane E. Frommer, Vladimir Matias, Chris Sheehan, Alp T. Findikoglu, Jens Jensen, Ruy Sanz, Marek Skupinski, Manuel Hernandez-Vélez, Göran Possnert, Klas Hjort, Yoshinori Matsui, Nozomi Miyoshi, Akihiro Oshima, Shue Seki, Masakazu Washio, Seiichi Tagawa, Sergey Gorelick, Timo Sajavaara, Mikko Laitinen, Nitipon Puttaraska, Harry J. Whitlow, Robert Lee Zimmerman, Ismet Gurhan, Daryush ILA, Xuanyong Liu, Paul K. Chu, Ahmet Oztarhan, Emel Sokullu Urkac, Nusret Kaya, Mesut Yenigul, Funda Tihminlioglu, Ayhan Ezdesir, Satilmis Budak, Claudiu Muntele, Bopha Chhay, Efim Oks, Alexey Nikolaev, Zekai Tek, Rengin Eltem, Harry Bernas, Roch Espiau de Lamaëstre, Amit Kumar, L. D. Filip, J. D. Carey, J. C. Pivin, A. Tripathi, Devesh K. Avasthi, Giovanni Mattei, Valentina Bello, Paola Mazzoldi, Giovanni Pellegrini, Chiara Maurizio, Giancarlo Battaglin, Anatoly Dvurechenskii, Nataly Stepina, Pavel Norikov, Vladislav Armrister, Valery Kesler, Anton Gutakovskii, Victor Kirienko, Zhanna Smagina, Reiner Groetzschel, Dipak Paramanik, Subrata Majumdar, Smruti Ranjan Sahoo, Shikha Varma, Bangke Zheng, Gikan Takaoka, Masakazu Kawashita, Takeshi Okada, F. Calzzani, S. Guner, C. C. Smith, Rei Araki, Volha Abidzina, I. Tereshko, I. Elkin, V. Red'ko, D. Walker, R. A. Minamisawa, Cong Qian, Zheng-xuan Zhang, Feng Zhang, Cheng-lu Lin, S. Dhamodaran, N. Sathish, Anand P. Pathak, Andrzej Turos, Brij M. Arora, Lee Chow, Guangyu Chai, Renato Amarel