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Advanced Metallization Conference 2005 (AMC 2005)

Advanced Metallization Conference 2005 (AMC 2005)

Volume 21

Part of MRS Conference Proceedings

  • Date Published: January 2006
  • availability: Available
  • format: Hardback
  • isbn: 9781558998650

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  • Technical leaders from around the world gather here to discuss developments in the areas of interconnect performance, advanced metallization, low-dielectric constant materials, barrier metallization, atomic layer deposition, advanced packaging and vertical integration. Both current state-of-the-art and ongoing challenges associated with multilevel interconnect are addressed. Included are papers on the latest developments in the integration of low-dielectric constant materials with copper-based metallization, and advances in the understanding of means by which process- or stress-induced damage can be mitigated and reliability of the interconnect system improved. Additional contributions discuss the design, development and modeling of advanced on-chip and multichip interconnect architectures and real-world implementation of optimized designs, materials and processes for production of leading-edge microelectronic devices.

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    Product details

    • Date Published: January 2006
    • format: Hardback
    • isbn: 9781558998650
    • length: 782 pages
    • dimensions: 235 x 160 x 44 mm
    • weight: 1.16kg
    • availability: Available
  • Editors

    Sywert H. Brongersma, IMEC, Leuven

    Thomas C. Taylor, Rohm and Haas Electronic Materials, Marlborough

    Manabu Tsujimura, Ebara Corporation, Fujisawa-shi

    Kazuya Masu, Tokyo Institute of Technology

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