Advanced Metallization and Interconnect Systems for ULSI Applications in 1995
Volume 11
Part of MRS Conference Proceedings
- Editors:
- Russell C. Ellwanger, Novellus Systems, Inc., San Jose, California
- Shi-Qing Wang, SEMATECH/National Semiconductor, Austin, Texas
- Date Published: February 2000
- availability: Available
- format: Hardback
- isbn: 9781558993419
Hardback
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×Product details
- Date Published: February 2000
- format: Hardback
- isbn: 9781558993419
- dimensions: 235 x 158 x 45 mm
- weight: 1.26kg
- availability: Available
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